On implant-based multiple gate oxide schemes for system-on-chip integration
نویسندگان
چکیده
منابع مشابه
On Implant-Based Multiple Gate Oxide Schemes for System-on-Chip Integration
Integrating the entire system on a chip (SOC) is one of themain challenges formany researchers all over the world. One of the major breakthroughs toward achieving this goal has been the ability to manufacture multiple gate oxides for different requirements on the same chip. The most attractive of the techniques currently in the literature is the implantation of nitrogen in silicon, which can be...
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ژورنال
عنوان ژورنال: IEEE Transactions on Electron Devices
سال: 2003
ISSN: 0018-9383
DOI: 10.1109/ted.2003.810473